LARGE AREA MULTI-COLUMN SCANNING ELECTRON MICROSCOPE OBJECTIVE LENS DESIGN

Ph.D

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Bibliographic Details
Main Author:	BALAMUNIAPPAN PRANESH
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Published:	2021
Subjects:	Multi-column SEM, Miniature Objective lens, e-beam wafer inspection system, Permanent Magnet, High-resolution miniature objective lens
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/209015
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-209015
record_format	dspace
spelling	sg-nus-scholar.10635-2090152021-11-30T18:01:10Z LARGE AREA MULTI-COLUMN SCANNING ELECTRON MICROSCOPE OBJECTIVE LENS DESIGN BALAMUNIAPPAN PRANESH ELECTRICAL & COMPUTER ENGINEERING Khursheed, Anjam Multi-column SEM, Miniature Objective lens, e-beam wafer inspection system, Permanent Magnet, High-resolution miniature objective lens Ph.D DOCTOR OF PHILOSOPHY (FOE) 2021-11-30T18:01:10Z 2021-11-30T18:01:10Z 2021-07-15 BALAMUNIAPPAN PRANESH (2021-07-15). LARGE AREA MULTI-COLUMN SCANNING ELECTRON MICROSCOPE OBJECTIVE LENS DESIGN. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/209015
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Multi-column SEM, Miniature Objective lens, e-beam wafer inspection system, Permanent Magnet, High-resolution miniature objective lens
spellingShingle	Multi-column SEM, Miniature Objective lens, e-beam wafer inspection system, Permanent Magnet, High-resolution miniature objective lens BALAMUNIAPPAN PRANESH LARGE AREA MULTI-COLUMN SCANNING ELECTRON MICROSCOPE OBJECTIVE LENS DESIGN
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING BALAMUNIAPPAN PRANESH
author	BALAMUNIAPPAN PRANESH
author_sort	BALAMUNIAPPAN PRANESH
title	LARGE AREA MULTI-COLUMN SCANNING ELECTRON MICROSCOPE OBJECTIVE LENS DESIGN
title_short	LARGE AREA MULTI-COLUMN SCANNING ELECTRON MICROSCOPE OBJECTIVE LENS DESIGN
title_full	LARGE AREA MULTI-COLUMN SCANNING ELECTRON MICROSCOPE OBJECTIVE LENS DESIGN
title_fullStr	LARGE AREA MULTI-COLUMN SCANNING ELECTRON MICROSCOPE OBJECTIVE LENS DESIGN
title_full_unstemmed	LARGE AREA MULTI-COLUMN SCANNING ELECTRON MICROSCOPE OBJECTIVE LENS DESIGN
title_sort	large area multi-column scanning electron microscope objective lens design
publishDate	2021
url	https://scholarbank.nus.edu.sg/handle/10635/209015
_version_	1718368011946033152

LARGE AREA MULTI-COLUMN SCANNING ELECTRON MICROSCOPE OBJECTIVE LENS DESIGN

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