Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications

10.1063/1.3062847

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Bibliographic Details
Main Authors:	Satyanarayana, N., Lau, K.H., Sinha, S.K.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2011
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/21642
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-21642
record_format	dspace
spelling	sg-nus-scholar.10635-216422023-10-27T08:58:21Z Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications Satyanarayana, N. Lau, K.H. Sinha, S.K. MECHANICAL ENGINEERING HISTORY 10.1063/1.3062847 Applied Physics Letters 93 26 APPLA 2011-04-20T07:20:27Z 2011-04-20T07:20:27Z 2008 Article Satyanarayana, N., Lau, K.H., Sinha, S.K. (2008). Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications. Applied Physics Letters 93 (26). ScholarBank@NUS Repository. https://doi.org/10.1063/1.3062847 00036951 http://scholarbank.nus.edu.sg/handle/10635/21642 000262225700027 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.3062847
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Satyanarayana, N. Lau, K.H. Sinha, S.K.
format	Article
author	Satyanarayana, N. Lau, K.H. Sinha, S.K.
spellingShingle	Satyanarayana, N. Lau, K.H. Sinha, S.K. Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications
author_sort	Satyanarayana, N.
title	Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications
title_short	Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications
title_full	Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications
title_fullStr	Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications
title_full_unstemmed	Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications
title_sort	nanolubrication of poly(methyl methacrylate) films on si for microelectromechanical systems applications
publishDate	2011
url	http://scholarbank.nus.edu.sg/handle/10635/21642
_version_	1781410161349361664

Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications

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