Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications
10.1063/1.3062847
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| Main Authors: | , , |
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| Other Authors: | |
| Format: | Article |
| Published: |
2011
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/21642 |
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| Institution: | National University of Singapore |