IN-SITU METROLOGY FOR PVD ALUMINIUM FILM THICKNESS MEASUREMENT
Master's
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2022
|
| Subjects: | |
| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/227561 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| Language: | English |
| id |
sg-nus-scholar.10635-227561 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-2275612024-10-25T04:28:10Z IN-SITU METROLOGY FOR PVD ALUMINIUM FILM THICKNESS MEASUREMENT WANG XINXIN MATERIALS SCIENCE AND ENGINEERING Jun Ding semiconductor, PVD, Aluminum, metrology, integration, thickness Master's MASTER OF ENGINEERING (CDE) 2022-06-30T18:00:26Z 2022-06-30T18:00:26Z 2022-01-11 Thesis WANG XINXIN (2022-01-11). IN-SITU METROLOGY FOR PVD ALUMINIUM FILM THICKNESS MEASUREMENT. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/227561 0000-0003-4347-2852 en |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
semiconductor, PVD, Aluminum, metrology, integration, thickness |
| spellingShingle |
semiconductor, PVD, Aluminum, metrology, integration, thickness WANG XINXIN IN-SITU METROLOGY FOR PVD ALUMINIUM FILM THICKNESS MEASUREMENT |
| description |
Master's |
| author2 |
MATERIALS SCIENCE AND ENGINEERING |
| author_facet |
MATERIALS SCIENCE AND ENGINEERING WANG XINXIN |
| format |
Theses and Dissertations |
| author |
WANG XINXIN |
| author_sort |
WANG XINXIN |
| title |
IN-SITU METROLOGY FOR PVD ALUMINIUM FILM THICKNESS MEASUREMENT |
| title_short |
IN-SITU METROLOGY FOR PVD ALUMINIUM FILM THICKNESS MEASUREMENT |
| title_full |
IN-SITU METROLOGY FOR PVD ALUMINIUM FILM THICKNESS MEASUREMENT |
| title_fullStr |
IN-SITU METROLOGY FOR PVD ALUMINIUM FILM THICKNESS MEASUREMENT |
| title_full_unstemmed |
IN-SITU METROLOGY FOR PVD ALUMINIUM FILM THICKNESS MEASUREMENT |
| title_sort |
in-situ metrology for pvd aluminium film thickness measurement |
| publishDate |
2022 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/227561 |
| _version_ |
1821186496880705536 |