Lithographic Processes for the Scalable Fabrication of Micro- And Nanostructures for Biochips and Biosensors

Lithographic Processes for the Scalable Fabrication of Micro- And Nanostructures for Biochips and Biosensors

10.1021/acssensors.0c02704

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Bibliographic Details
Main Authors: Fruncillo, Silvia, Su, Xiaodi, Liu, Hong, Wong, Lu Shin
Other Authors: CHEMISTRY
Format: Review
Published: American Chemical Society 2022
Subjects:
biochips
biosensors
DNA microarray
electrochemical sensing
high resolution
high throughput
large-scale lithography
nanopore sensors
plasmonic
protein array
Online Access:https://scholarbank.nus.edu.sg/handle/10635/232922
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Institution: National University of Singapore
Description
Summary:10.1021/acssensors.0c02704

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