Lithographic Processes for the Scalable Fabrication of Micro- And Nanostructures for Biochips and Biosensors

10.1021/acssensors.0c02704

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Bibliographic Details
Main Authors:	Fruncillo, Silvia, Su, Xiaodi, Liu, Hong, Wong, Lu Shin
Other Authors:	CHEMISTRY
Format:	Review
Published:	American Chemical Society 2022
Subjects:	biochips biosensors DNA microarray electrochemical sensing high resolution high throughput large-scale lithography nanopore sensors plasmonic protein array
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/232922
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-232922
record_format	dspace
spelling	sg-nus-scholar.10635-2329222024-04-17T06:17:45Z Lithographic Processes for the Scalable Fabrication of Micro- And Nanostructures for Biochips and Biosensors Fruncillo, Silvia Su, Xiaodi Liu, Hong Wong, Lu Shin CHEMISTRY biochips biosensors DNA microarray electrochemical sensing high resolution high throughput large-scale lithography nanopore sensors plasmonic protein array 10.1021/acssensors.0c02704 ACS Sensors 6 6 2022-10-13T01:19:07Z 2022-10-13T01:19:07Z 2021-04-08 Review Fruncillo, Silvia, Su, Xiaodi, Liu, Hong, Wong, Lu Shin (2021-04-08). Lithographic Processes for the Scalable Fabrication of Micro- And Nanostructures for Biochips and Biosensors. ACS Sensors 6 (6). ScholarBank@NUS Repository. https://doi.org/10.1021/acssensors.0c02704 2379-3694 https://scholarbank.nus.edu.sg/handle/10635/232922 Attribution 4.0 International https://creativecommons.org/licenses/by/4.0/ American Chemical Society Scopus OA2021
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	biochips biosensors DNA microarray electrochemical sensing high resolution high throughput large-scale lithography nanopore sensors plasmonic protein array
spellingShingle	biochips biosensors DNA microarray electrochemical sensing high resolution high throughput large-scale lithography nanopore sensors plasmonic protein array Fruncillo, Silvia Su, Xiaodi Liu, Hong Wong, Lu Shin Lithographic Processes for the Scalable Fabrication of Micro- And Nanostructures for Biochips and Biosensors
description	10.1021/acssensors.0c02704
author2	CHEMISTRY
author_facet	CHEMISTRY Fruncillo, Silvia Su, Xiaodi Liu, Hong Wong, Lu Shin
format	Review
author	Fruncillo, Silvia Su, Xiaodi Liu, Hong Wong, Lu Shin
author_sort	Fruncillo, Silvia
title	Lithographic Processes for the Scalable Fabrication of Micro- And Nanostructures for Biochips and Biosensors
title_short	Lithographic Processes for the Scalable Fabrication of Micro- And Nanostructures for Biochips and Biosensors
title_full	Lithographic Processes for the Scalable Fabrication of Micro- And Nanostructures for Biochips and Biosensors
title_fullStr	Lithographic Processes for the Scalable Fabrication of Micro- And Nanostructures for Biochips and Biosensors
title_full_unstemmed	Lithographic Processes for the Scalable Fabrication of Micro- And Nanostructures for Biochips and Biosensors
title_sort	lithographic processes for the scalable fabrication of micro- and nanostructures for biochips and biosensors
publisher	American Chemical Society
publishDate	2022
url	https://scholarbank.nus.edu.sg/handle/10635/232922
_version_	1800915643422212096

Lithographic Processes for the Scalable Fabrication of Micro- And Nanostructures for Biochips and Biosensors

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