Suspended silicon waveguide with sub-wavelength grating cladding for optical mems in mid-infrared

10.3390/mi12111311

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Bibliographic Details
Main Authors:	Qiao, Qifeng, Sun, Haoyang, Liu, Xinmiao, Dong, Bowei, Xia, Ji, Lee, Chengkuo, Zhou, Guangya
Other Authors:	COLLEGE OF DESIGN AND ENGINEERING
Format:	Article
Published:	MDPI 2022
Subjects:	MIR photonics Optical MEMS Photonic integrated circuit Reconfigurable photonics Silicon photonics
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/233103
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-233103
record_format	dspace
spelling	sg-nus-scholar.10635-2331032023-09-21T08:48:32Z Suspended silicon waveguide with sub-wavelength grating cladding for optical mems in mid-infrared Qiao, Qifeng Sun, Haoyang Liu, Xinmiao Dong, Bowei Xia, Ji Lee, Chengkuo Zhou, Guangya COLLEGE OF DESIGN AND ENGINEERING SAW SWEE HOCK SCHOOL OF PUBLIC HEALTH ELECTRICAL AND COMPUTER ENGINEERING MIR photonics Optical MEMS Photonic integrated circuit Reconfigurable photonics Silicon photonics 10.3390/mi12111311 Micromachines 12 11 1311 2022-10-13T07:31:17Z 2022-10-13T07:31:17Z 2021-10-26 Article Qiao, Qifeng, Sun, Haoyang, Liu, Xinmiao, Dong, Bowei, Xia, Ji, Lee, Chengkuo, Zhou, Guangya (2021-10-26). Suspended silicon waveguide with sub-wavelength grating cladding for optical mems in mid-infrared. Micromachines 12 (11) : 1311. ScholarBank@NUS Repository. https://doi.org/10.3390/mi12111311 2072-666X https://scholarbank.nus.edu.sg/handle/10635/233103 Attribution 4.0 International https://creativecommons.org/licenses/by/4.0/ MDPI Scopus OA2021
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	MIR photonics Optical MEMS Photonic integrated circuit Reconfigurable photonics Silicon photonics
spellingShingle	MIR photonics Optical MEMS Photonic integrated circuit Reconfigurable photonics Silicon photonics Qiao, Qifeng Sun, Haoyang Liu, Xinmiao Dong, Bowei Xia, Ji Lee, Chengkuo Zhou, Guangya Suspended silicon waveguide with sub-wavelength grating cladding for optical mems in mid-infrared
description	10.3390/mi12111311
author2	COLLEGE OF DESIGN AND ENGINEERING
author_facet	COLLEGE OF DESIGN AND ENGINEERING Qiao, Qifeng Sun, Haoyang Liu, Xinmiao Dong, Bowei Xia, Ji Lee, Chengkuo Zhou, Guangya
format	Article
author	Qiao, Qifeng Sun, Haoyang Liu, Xinmiao Dong, Bowei Xia, Ji Lee, Chengkuo Zhou, Guangya
author_sort	Qiao, Qifeng
title	Suspended silicon waveguide with sub-wavelength grating cladding for optical mems in mid-infrared
title_short	Suspended silicon waveguide with sub-wavelength grating cladding for optical mems in mid-infrared
title_full	Suspended silicon waveguide with sub-wavelength grating cladding for optical mems in mid-infrared
title_fullStr	Suspended silicon waveguide with sub-wavelength grating cladding for optical mems in mid-infrared
title_full_unstemmed	Suspended silicon waveguide with sub-wavelength grating cladding for optical mems in mid-infrared
title_sort	suspended silicon waveguide with sub-wavelength grating cladding for optical mems in mid-infrared
publisher	MDPI
publishDate	2022
url	https://scholarbank.nus.edu.sg/handle/10635/233103
_version_	1779155186378342400

Suspended silicon waveguide with sub-wavelength grating cladding for optical mems in mid-infrared

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