Suspended silicon waveguide with sub-wavelength grating cladding for optical mems in mid-infrared

10.3390/mi12111311

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Bibliographic Details
Main Authors: Qiao, Qifeng, Sun, Haoyang, Liu, Xinmiao, Dong, Bowei, Xia, Ji, Lee, Chengkuo, Zhou, Guangya
Other Authors: COLLEGE OF DESIGN AND ENGINEERING
Format: Article
Published: MDPI 2022
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Online Access:https://scholarbank.nus.edu.sg/handle/10635/233103
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Institution: National University of Singapore

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