MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications

• Main Authors: Xinmiao Liu, Qifeng Qiao, Bowei Dong, Weixin Liu, Cheng Xu, Siyu Xu, Guangya ZHOU
• Other Authors: ELECTRICAL AND COMPUTER ENGINEERING
• Format: Article
• Published: Taylor & Francis 2023
• Online Access: https://scholarbank.nus.edu.sg/handle/10635/236341
• Institution: National University of Singapore

10.1080/15599612.2022.2137608