MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications
10.1080/15599612.2022.2137608
Saved in:
| Main Authors: | , , , , , , |
|---|---|
| Other Authors: | |
| Format: | Article |
| Published: |
Taylor & Francis
2023
|
| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/236341 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-236341 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-2363412024-11-13T01:52:09Z MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications Xinmiao Liu Qifeng Qiao Bowei Dong Weixin Liu Cheng Xu Siyu Xu Guangya ZHOU ELECTRICAL AND COMPUTER ENGINEERING MECHANICAL ENGINEERING 10.1080/15599612.2022.2137608 International Journal of Optomechatronics 16 1 42-57 2023-01-25T06:08:43Z 2023-01-25T06:08:43Z 2022-12-05 Article Xinmiao Liu, Qifeng Qiao, Bowei Dong, Weixin Liu, Cheng Xu, Siyu Xu, Guangya ZHOU (2022-12-05). MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications. International Journal of Optomechatronics 16 (1) : 42-57. ScholarBank@NUS Repository. https://doi.org/10.1080/15599612.2022.2137608 1559-9612 https://scholarbank.nus.edu.sg/handle/10635/236341 Taylor & Francis Taylor & Francis |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1080/15599612.2022.2137608 |
| author2 |
ELECTRICAL AND COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL AND COMPUTER ENGINEERING Xinmiao Liu Qifeng Qiao Bowei Dong Weixin Liu Cheng Xu Siyu Xu Guangya ZHOU |
| format |
Article |
| author |
Xinmiao Liu Qifeng Qiao Bowei Dong Weixin Liu Cheng Xu Siyu Xu Guangya ZHOU |
| spellingShingle |
Xinmiao Liu Qifeng Qiao Bowei Dong Weixin Liu Cheng Xu Siyu Xu Guangya ZHOU MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications |
| author_sort |
Xinmiao Liu |
| title |
MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications |
| title_short |
MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications |
| title_full |
MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications |
| title_fullStr |
MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications |
| title_full_unstemmed |
MEMS enabled suspended silicon waveguide platform for long-wave infrared modulation applications |
| title_sort |
mems enabled suspended silicon waveguide platform for long-wave infrared modulation applications |
| publisher |
Taylor & Francis |
| publishDate |
2023 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/236341 |
| _version_ |
1821227220826324992 |