ENGINEERING OF SURFACES AND INTERFACES BY PLASMA FOR MATERIALS AND DEVICES

Ph.D

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Bibliographic Details
Main Author:	KOH TUCK FOONG
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2023
Subjects:	Plasma, Surface, Interface, Selective, Etching, Microelectronics
Online Access:	https://scholarbank.nus.edu.sg/handle/10635/241097
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Institution:	National University of Singapore
Language:	English

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record_format	dspace
spelling	sg-nus-scholar.10635-2410972024-04-17T02:40:43Z ENGINEERING OF SURFACES AND INTERFACES BY PLASMA FOR MATERIALS AND DEVICES KOH TUCK FOONG MATERIALS SCIENCE AND ENGINEERING John Wang Plasma, Surface, Interface, Selective, Etching, Microelectronics Ph.D DOCTOR OF ENGINEERING 2023-05-27T18:00:16Z 2023-05-27T18:00:16Z 2023-01-12 Thesis KOH TUCK FOONG (2023-01-12). ENGINEERING OF SURFACES AND INTERFACES BY PLASMA FOR MATERIALS AND DEVICES. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/241097 0009-0007-9878-5123 en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	Plasma, Surface, Interface, Selective, Etching, Microelectronics
spellingShingle	Plasma, Surface, Interface, Selective, Etching, Microelectronics KOH TUCK FOONG ENGINEERING OF SURFACES AND INTERFACES BY PLASMA FOR MATERIALS AND DEVICES
description	Ph.D
author2	MATERIALS SCIENCE AND ENGINEERING
author_facet	MATERIALS SCIENCE AND ENGINEERING KOH TUCK FOONG
format	Theses and Dissertations
author	KOH TUCK FOONG
author_sort	KOH TUCK FOONG
title	ENGINEERING OF SURFACES AND INTERFACES BY PLASMA FOR MATERIALS AND DEVICES
title_short	ENGINEERING OF SURFACES AND INTERFACES BY PLASMA FOR MATERIALS AND DEVICES
title_full	ENGINEERING OF SURFACES AND INTERFACES BY PLASMA FOR MATERIALS AND DEVICES
title_fullStr	ENGINEERING OF SURFACES AND INTERFACES BY PLASMA FOR MATERIALS AND DEVICES
title_full_unstemmed	ENGINEERING OF SURFACES AND INTERFACES BY PLASMA FOR MATERIALS AND DEVICES
title_sort	engineering of surfaces and interfaces by plasma for materials and devices
publishDate	2023
url	https://scholarbank.nus.edu.sg/handle/10635/241097
_version_	1800915848089567232

ENGINEERING OF SURFACES AND INTERFACES BY PLASMA FOR MATERIALS AND DEVICES

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