DEVELOPMENT OF A MEMS LAMELLAR GRATING SPECTROMETER FOR FOURIER TRANSFORM SPECTROSCOPY

DEVELOPMENT OF A MEMS LAMELLAR GRATING SPECTROMETER FOR FOURIER TRANSFORM SPECTROSCOPY

Ph.D

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Bibliographic Details
Main Author: WANG SHOUHUA
Other Authors: MECHANICAL ENGINEERING
Format: Theses and Dissertations
Language:English
Published: 2011
Subjects:
MEMS, Fourier transform, lamellar grating spectrometer, microfabrication, parallel plate actuator, FWHM resolution
Online Access:http://scholarbank.nus.edu.sg/handle/10635/25882
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Institution: National University of Singapore
Language: English

Internet

http://scholarbank.nus.edu.sg/handle/10635/25882

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