DEVELOPMENT OF A MEMS LAMELLAR GRATING SPECTROMETER FOR FOURIER TRANSFORM SPECTROSCOPY

Ph.D

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Bibliographic Details
Main Author:	WANG SHOUHUA
Other Authors:	MECHANICAL ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2011
Subjects:	MEMS, Fourier transform, lamellar grating spectrometer, microfabrication, parallel plate actuator, FWHM resolution
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/25882
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-25882
record_format	dspace
spelling	sg-nus-scholar.10635-258822017-10-21T08:40:55Z DEVELOPMENT OF A MEMS LAMELLAR GRATING SPECTROMETER FOR FOURIER TRANSFORM SPECTROSCOPY WANG SHOUHUA MECHANICAL ENGINEERING CHAU FOOK SIONG ZHOU GUANGYA MEMS, Fourier transform, lamellar grating spectrometer, microfabrication, parallel plate actuator, FWHM resolution Ph.D DOCTOR OF PHILOSOPHY 2011-09-08T18:00:13Z 2011-09-08T18:00:13Z 2011-01-03 Thesis WANG SHOUHUA (2011-01-03). DEVELOPMENT OF A MEMS LAMELLAR GRATING SPECTROMETER FOR FOURIER TRANSFORM SPECTROSCOPY. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/25882 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	MEMS, Fourier transform, lamellar grating spectrometer, microfabrication, parallel plate actuator, FWHM resolution
spellingShingle	MEMS, Fourier transform, lamellar grating spectrometer, microfabrication, parallel plate actuator, FWHM resolution WANG SHOUHUA DEVELOPMENT OF A MEMS LAMELLAR GRATING SPECTROMETER FOR FOURIER TRANSFORM SPECTROSCOPY
description	Ph.D
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING WANG SHOUHUA
format	Theses and Dissertations
author	WANG SHOUHUA
author_sort	WANG SHOUHUA
title	DEVELOPMENT OF A MEMS LAMELLAR GRATING SPECTROMETER FOR FOURIER TRANSFORM SPECTROSCOPY
title_short	DEVELOPMENT OF A MEMS LAMELLAR GRATING SPECTROMETER FOR FOURIER TRANSFORM SPECTROSCOPY
title_full	DEVELOPMENT OF A MEMS LAMELLAR GRATING SPECTROMETER FOR FOURIER TRANSFORM SPECTROSCOPY
title_fullStr	DEVELOPMENT OF A MEMS LAMELLAR GRATING SPECTROMETER FOR FOURIER TRANSFORM SPECTROSCOPY
title_full_unstemmed	DEVELOPMENT OF A MEMS LAMELLAR GRATING SPECTROMETER FOR FOURIER TRANSFORM SPECTROSCOPY
title_sort	development of a mems lamellar grating spectrometer for fourier transform spectroscopy
publishDate	2011
url	http://scholarbank.nus.edu.sg/handle/10635/25882
_version_	1681080375327064064

DEVELOPMENT OF A MEMS LAMELLAR GRATING SPECTROMETER FOR FOURIER TRANSFORM SPECTROSCOPY

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