Study on etching and characterization of advanced gate stack
Master's
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| Format: | Theses and Dissertations |
| Language: | English |
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2011
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| Online Access: | https://scholarbank.nus.edu.sg/handle/10635/27680 |
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sg-nus-scholar.10635-276802024-10-26T04:38:25Z Study on etching and characterization of advanced gate stack TAN KIAN MING ELECTRICAL & COMPUTER ENGINEERING YOO WON JONG Etching, Poly SiGe, HfO2, Trimming, Notch Gate Master's MASTER OF ENGINEERING 2011-10-12T18:01:09Z 2011-10-12T18:01:09Z 2004-11-30 Thesis TAN KIAN MING (2004-11-30). Study on etching and characterization of advanced gate stack. ScholarBank@NUS Repository. https://scholarbank.nus.edu.sg/handle/10635/27680 NOT_IN_WOS en |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| language |
English |
| topic |
Etching, Poly SiGe, HfO2, Trimming, Notch Gate |
| spellingShingle |
Etching, Poly SiGe, HfO2, Trimming, Notch Gate TAN KIAN MING Study on etching and characterization of advanced gate stack |
| description |
Master's |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING TAN KIAN MING |
| format |
Theses and Dissertations |
| author |
TAN KIAN MING |
| author_sort |
TAN KIAN MING |
| title |
Study on etching and characterization of advanced gate stack |
| title_short |
Study on etching and characterization of advanced gate stack |
| title_full |
Study on etching and characterization of advanced gate stack |
| title_fullStr |
Study on etching and characterization of advanced gate stack |
| title_full_unstemmed |
Study on etching and characterization of advanced gate stack |
| title_sort |
study on etching and characterization of advanced gate stack |
| publishDate |
2011 |
| url |
https://scholarbank.nus.edu.sg/handle/10635/27680 |
| _version_ |
1821200204736495616 |