Control of Resist Processing in Lithography

Ph.D

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Bibliographic Details
Main Author:	KIEW CHOON MENG
Other Authors:	NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG
Format:	Theses and Dissertations
Language:	English
Published:	2011
Subjects:	Thickness Estimation, Develop Step, Process Control, Feedforward Control, Minimax
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/28185
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-28185
record_format	dspace
spelling	sg-nus-scholar.10635-281852015-01-21T21:07:58Z Control of Resist Processing in Lithography KIEW CHOON MENG NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG Thickness Estimation, Develop Step, Process Control, Feedforward Control, Minimax Ph.D DOCTOR OF PHILOSOPHY 2011-11-08T18:01:32Z 2011-11-08T18:01:32Z 2008-06-09 Thesis KIEW CHOON MENG (2008-06-09). Control of Resist Processing in Lithography. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/28185 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Thickness Estimation, Develop Step, Process Control, Feedforward Control, Minimax
spellingShingle	Thickness Estimation, Develop Step, Process Control, Feedforward Control, Minimax KIEW CHOON MENG Control of Resist Processing in Lithography
description	Ph.D
author2	NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG
author_facet	NUS GRAD SCH FOR INTEGRATIVE SCI & ENGG KIEW CHOON MENG
format	Theses and Dissertations
author	KIEW CHOON MENG
author_sort	KIEW CHOON MENG
title	Control of Resist Processing in Lithography
title_short	Control of Resist Processing in Lithography
title_full	Control of Resist Processing in Lithography
title_fullStr	Control of Resist Processing in Lithography
title_full_unstemmed	Control of Resist Processing in Lithography
title_sort	control of resist processing in lithography
publishDate	2011
url	http://scholarbank.nus.edu.sg/handle/10635/28185
_version_	1681080665014009856

Control of Resist Processing in Lithography

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