Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing

Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing

10.1016/S0959-1524(03)00069-6

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Bibliographic Details
Main Authors: Tay, A., Ho, W.K., Schaper, C.D., Lee, L.L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Feedforward control
Semiconductor manufacturing
Temperature control
Online Access:http://scholarbank.nus.edu.sg/handle/10635/55406
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/55406

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