Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing
10.1016/S0959-1524(03)00069-6
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sg-nus-scholar.10635-554062024-11-14T02:32:22Z Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing Tay, A. Ho, W.K. Schaper, C.D. Lee, L.L. ELECTRICAL & COMPUTER ENGINEERING Feedforward control Semiconductor manufacturing Temperature control 10.1016/S0959-1524(03)00069-6 Journal of Process Control 14 1 31-39 JPCOE 2014-06-17T02:42:42Z 2014-06-17T02:42:42Z 2004-02 Article Tay, A., Ho, W.K., Schaper, C.D., Lee, L.L. (2004-02). Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing. Journal of Process Control 14 (1) : 31-39. ScholarBank@NUS Repository. https://doi.org/10.1016/S0959-1524(03)00069-6 09591524 http://scholarbank.nus.edu.sg/handle/10635/55406 000186100900003 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Feedforward control Semiconductor manufacturing Temperature control |
| spellingShingle |
Feedforward control Semiconductor manufacturing Temperature control Tay, A. Ho, W.K. Schaper, C.D. Lee, L.L. Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing |
| description |
10.1016/S0959-1524(03)00069-6 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Tay, A. Ho, W.K. Schaper, C.D. Lee, L.L. |
| format |
Article |
| author |
Tay, A. Ho, W.K. Schaper, C.D. Lee, L.L. |
| author_sort |
Tay, A. |
| title |
Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing |
| title_short |
Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing |
| title_full |
Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing |
| title_fullStr |
Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing |
| title_full_unstemmed |
Constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing |
| title_sort |
constraint feedforward control for thermal processing of quartz photomasks in microelectronics manufacturing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/55406 |
| _version_ |
1821187341893500928 |