Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks

10.1117/12.404846

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Bibliographic Details
Main Authors: Ho, W.K., Tay, A.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81541
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Institution: National University of Singapore