Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks

Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks

10.1117/12.404846

Saved in:
Bibliographic Details
Main Authors: Ho, W.K., Tay, A.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Optimal control
Process control
Semiconductor manufacturing
Temperature control
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81541
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Description
Summary:10.1117/12.404846

Similar Items