Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks

10.1117/12.404846

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Bibliographic Details
Main Authors:	Ho, W.K., Tay, A.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Optimal control Process control Semiconductor manufacturing Temperature control
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81541
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81541
record_format	dspace
spelling	sg-nus-scholar.10635-815412023-10-25T22:28:10Z Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks Ho, W.K. Tay, A. ELECTRICAL ENGINEERING Optimal control Process control Semiconductor manufacturing Temperature control 10.1117/12.404846 Proceedings of SPIE - The International Society for Optical Engineering 4226 115-123 PSISD 2014-10-07T03:09:25Z 2014-10-07T03:09:25Z 2000 Conference Paper Ho, W.K., Tay, A. (2000). Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks. Proceedings of SPIE - The International Society for Optical Engineering 4226 : 115-123. ScholarBank@NUS Repository. https://doi.org/10.1117/12.404846 0277786X http://scholarbank.nus.edu.sg/handle/10635/81541 000167995100013 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Optimal control Process control Semiconductor manufacturing Temperature control
spellingShingle	Optimal control Process control Semiconductor manufacturing Temperature control Ho, W.K. Tay, A. Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks
description	10.1117/12.404846
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Ho, W.K. Tay, A.
format	Conference or Workshop Item
author	Ho, W.K. Tay, A.
author_sort	Ho, W.K.
title	Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks
title_short	Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks
title_full	Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks
title_fullStr	Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks
title_full_unstemmed	Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks
title_sort	minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81541
_version_	1781783987633520640

Minimum-time optimal feedforward control of conductive heating systems for microelectronics processing of silicon wafers and quatz photomasks

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