A micro capacitive pressure sensor with two deformable electrodes : design, optimization and fabrication

A micro capacitive pressure sensor with two deformable electrodes : design, optimization and fabrication

Ph.D

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Bibliographic Details
Main Author: GE PEI
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Theses and Dissertations
Language:English
Published: 2012
Subjects:
Micro Pressure Sensor, Finite Element Method, Analytical Model, Genetic Algorithm, Micromachining, Chip Testing,
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32480
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Institution: National University of Singapore
Language: English

Internet

http://scholarbank.nus.edu.sg/handle/10635/32480

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