A micro capacitive pressure sensor with two deformable electrodes : design, optimization and fabrication

Ph.D

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Main Author:	GE PEI
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2012
Subjects:	Micro Pressure Sensor, Finite Element Method, Analytical Model, Genetic Algorithm, Micromachining, Chip Testing,
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/32480
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-32480
record_format	dspace
spelling	sg-nus-scholar.10635-324802015-01-10T08:13:42Z A micro capacitive pressure sensor with two deformable electrodes : design, optimization and fabrication GE PEI ELECTRICAL & COMPUTER ENGINEERING TAN WOEI WAN LOH AI POH TAY ENG HOCK Micro Pressure Sensor, Finite Element Method, Analytical Model, Genetic Algorithm, Micromachining, Chip Testing, Ph.D DOCTOR OF PHILOSOPHY 2012-04-30T18:01:17Z 2012-04-30T18:01:17Z 2006-10-02 Thesis GE PEI (2006-10-02). A micro capacitive pressure sensor with two deformable electrodes : design, optimization and fabrication. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32480 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Micro Pressure Sensor, Finite Element Method, Analytical Model, Genetic Algorithm, Micromachining, Chip Testing,
spellingShingle	Micro Pressure Sensor, Finite Element Method, Analytical Model, Genetic Algorithm, Micromachining, Chip Testing, GE PEI A micro capacitive pressure sensor with two deformable electrodes : design, optimization and fabrication
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING GE PEI
format	Theses and Dissertations
author	GE PEI
author_sort	GE PEI
title	A micro capacitive pressure sensor with two deformable electrodes : design, optimization and fabrication
title_short	A micro capacitive pressure sensor with two deformable electrodes : design, optimization and fabrication
title_full	A micro capacitive pressure sensor with two deformable electrodes : design, optimization and fabrication
title_fullStr	A micro capacitive pressure sensor with two deformable electrodes : design, optimization and fabrication
title_full_unstemmed	A micro capacitive pressure sensor with two deformable electrodes : design, optimization and fabrication
title_sort	micro capacitive pressure sensor with two deformable electrodes : design, optimization and fabrication
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/32480
_version_	1681081233174429696

A micro capacitive pressure sensor with two deformable electrodes : design, optimization and fabrication

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