Rotational stage for high speed, large area scanning in focused beam systems

• Main Authors: LIU, YONG YU, CHAN, DANIEL S. H., PHANG, JACOB C. H.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Patent
• Published: 2012
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/32706
• Institution: National University of Singapore

US6911656