Capacitive pressure sensor with a cantilever member

Capacitive pressure sensor with a cantilever member

US7478559

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Bibliographic Details
Main Authors: TAN, WOEI WAN, GE, PEI, TAY, ENG HOCK FRANCIS, PHANG, JYH SIONG
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32771
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/32771

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