Method to fabricate horizontal air columns underneath metal inductor

US7573081

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Bibliographic Details
Main Authors:	CHAN, LAP, CHEW, KOK WAI JOHNNY, CHA, CHER LIANG, CHUA, CHEE TEE
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Patent
Published:	2012
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/32778
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-32778
record_format	dspace
spelling	sg-nus-scholar.10635-327782015-07-29T07:04:02Z Method to fabricate horizontal air columns underneath metal inductor CHAN, LAP CHEW, KOK WAI JOHNNY CHA, CHER LIANG CHUA, CHEE TEE ELECTRICAL & COMPUTER ENGINEERING CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE US7573081 Granted Patent 2012-05-02T02:30:16Z 2012-05-02T02:30:16Z 2009-08-11 Patent CHAN, LAP,CHEW, KOK WAI JOHNNY,CHA, CHER LIANG,CHUA, CHEE TEE (2009-08-11). Method to fabricate horizontal air columns underneath metal inductor. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32778 NOT_IN_WOS PatSnap
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	US7573081
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING CHAN, LAP CHEW, KOK WAI JOHNNY CHA, CHER LIANG CHUA, CHEE TEE
format	Patent
author	CHAN, LAP CHEW, KOK WAI JOHNNY CHA, CHER LIANG CHUA, CHEE TEE
spellingShingle	CHAN, LAP CHEW, KOK WAI JOHNNY CHA, CHER LIANG CHUA, CHEE TEE Method to fabricate horizontal air columns underneath metal inductor
author_sort	CHAN, LAP
title	Method to fabricate horizontal air columns underneath metal inductor
title_short	Method to fabricate horizontal air columns underneath metal inductor
title_full	Method to fabricate horizontal air columns underneath metal inductor
title_fullStr	Method to fabricate horizontal air columns underneath metal inductor
title_full_unstemmed	Method to fabricate horizontal air columns underneath metal inductor
title_sort	method to fabricate horizontal air columns underneath metal inductor
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/32778
_version_	1681081285049581568

Method to fabricate horizontal air columns underneath metal inductor

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