Method to fabricate horizontal air columns underneath metal inductor

Method to fabricate horizontal air columns underneath metal inductor

US7105420

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Bibliographic Details
Main Authors: CHAN, LAP, CHEW, KOK WAI JOHNNY, CHA, CHER LIANG, CHUA, CHEE TEE
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32723
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/32723

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