Method to fabricate horizontal air columns underneath metal inductor

• Main Authors: CHAN, LAP, CHEW, KOK WAI JOHNNY, CHA, CHER LIANG, CHUA, CHEE TEE
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Patent
• Published: 2012
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/32723
• Institution: National University of Singapore

US7105420