Method to fabricate horizontal air columns underneath metal inductor

US7105420

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Bibliographic Details
Main Authors: CHAN, LAP, CHEW, KOK WAI JOHNNY, CHA, CHER LIANG, CHUA, CHEE TEE
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Patent
Published: 2012
Online Access:http://scholarbank.nus.edu.sg/handle/10635/32723
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Institution: National University of Singapore
id sg-nus-scholar.10635-32723
record_format dspace
spelling sg-nus-scholar.10635-327232015-07-29T07:03:55Z Method to fabricate horizontal air columns underneath metal inductor CHAN, LAP CHEW, KOK WAI JOHNNY CHA, CHER LIANG CHUA, CHEE TEE ELECTRICAL & COMPUTER ENGINEERING CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE US7105420 Granted Patent 2012-05-02T02:29:25Z 2012-05-02T02:29:25Z 2006-09-12 Patent CHAN, LAP,CHEW, KOK WAI JOHNNY,CHA, CHER LIANG,CHUA, CHEE TEE (2006-09-12). Method to fabricate horizontal air columns underneath metal inductor. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32723 NOT_IN_WOS PatSnap
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description US7105420
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
CHAN, LAP
CHEW, KOK WAI JOHNNY
CHA, CHER LIANG
CHUA, CHEE TEE
format Patent
author CHAN, LAP
CHEW, KOK WAI JOHNNY
CHA, CHER LIANG
CHUA, CHEE TEE
spellingShingle CHAN, LAP
CHEW, KOK WAI JOHNNY
CHA, CHER LIANG
CHUA, CHEE TEE
Method to fabricate horizontal air columns underneath metal inductor
author_sort CHAN, LAP
title Method to fabricate horizontal air columns underneath metal inductor
title_short Method to fabricate horizontal air columns underneath metal inductor
title_full Method to fabricate horizontal air columns underneath metal inductor
title_fullStr Method to fabricate horizontal air columns underneath metal inductor
title_full_unstemmed Method to fabricate horizontal air columns underneath metal inductor
title_sort method to fabricate horizontal air columns underneath metal inductor
publishDate 2012
url http://scholarbank.nus.edu.sg/handle/10635/32723
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