Method to fabricate horizontal air columns underneath metal inductor
US7105420
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2012
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/32723 |
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sg-nus-scholar.10635-327232015-07-29T07:03:55Z Method to fabricate horizontal air columns underneath metal inductor CHAN, LAP CHEW, KOK WAI JOHNNY CHA, CHER LIANG CHUA, CHEE TEE ELECTRICAL & COMPUTER ENGINEERING CHARTERED SEMICONDUCTOR MANUFACTURING LTD. (SINGAPORE, SG) NATIONAL UNIVERSITY OF SINGAPORE US7105420 Granted Patent 2012-05-02T02:29:25Z 2012-05-02T02:29:25Z 2006-09-12 Patent CHAN, LAP,CHEW, KOK WAI JOHNNY,CHA, CHER LIANG,CHUA, CHEE TEE (2006-09-12). Method to fabricate horizontal air columns underneath metal inductor. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/32723 NOT_IN_WOS PatSnap |
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National University of Singapore |
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Singapore |
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ScholarBank@NUS |
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US7105420 |
author2 |
ELECTRICAL & COMPUTER ENGINEERING |
author_facet |
ELECTRICAL & COMPUTER ENGINEERING CHAN, LAP CHEW, KOK WAI JOHNNY CHA, CHER LIANG CHUA, CHEE TEE |
format |
Patent |
author |
CHAN, LAP CHEW, KOK WAI JOHNNY CHA, CHER LIANG CHUA, CHEE TEE |
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CHAN, LAP CHEW, KOK WAI JOHNNY CHA, CHER LIANG CHUA, CHEE TEE Method to fabricate horizontal air columns underneath metal inductor |
author_sort |
CHAN, LAP |
title |
Method to fabricate horizontal air columns underneath metal inductor |
title_short |
Method to fabricate horizontal air columns underneath metal inductor |
title_full |
Method to fabricate horizontal air columns underneath metal inductor |
title_fullStr |
Method to fabricate horizontal air columns underneath metal inductor |
title_full_unstemmed |
Method to fabricate horizontal air columns underneath metal inductor |
title_sort |
method to fabricate horizontal air columns underneath metal inductor |
publishDate |
2012 |
url |
http://scholarbank.nus.edu.sg/handle/10635/32723 |
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1681081275203452928 |