Integrated Metrology and Real-Time CD Control

Ph.D

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Bibliographic Details
Main Author:	NGO YIT SUNG
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2012
Subjects:	real-time control, critical dimensions, spectroscopic ellipsometry, advanced process control, post-exposure bake, lithography
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/33396
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-33396
record_format	dspace
spelling	sg-nus-scholar.10635-333962024-10-26T03:25:59Z Integrated Metrology and Real-Time CD Control NGO YIT SUNG ELECTRICAL & COMPUTER ENGINEERING TAY EE BENG, ARTHUR real-time control, critical dimensions, spectroscopic ellipsometry, advanced process control, post-exposure bake, lithography Ph.D DOCTOR OF PHILOSOPHY 2012-05-31T18:03:37Z 2012-05-31T18:03:37Z 2012-01-17 Thesis NGO YIT SUNG (2012-01-17). Integrated Metrology and Real-Time CD Control. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/33396 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
language	English
topic	real-time control, critical dimensions, spectroscopic ellipsometry, advanced process control, post-exposure bake, lithography
spellingShingle	real-time control, critical dimensions, spectroscopic ellipsometry, advanced process control, post-exposure bake, lithography NGO YIT SUNG Integrated Metrology and Real-Time CD Control
description	Ph.D
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING NGO YIT SUNG
format	Theses and Dissertations
author	NGO YIT SUNG
author_sort	NGO YIT SUNG
title	Integrated Metrology and Real-Time CD Control
title_short	Integrated Metrology and Real-Time CD Control
title_full	Integrated Metrology and Real-Time CD Control
title_fullStr	Integrated Metrology and Real-Time CD Control
title_full_unstemmed	Integrated Metrology and Real-Time CD Control
title_sort	integrated metrology and real-time cd control
publishDate	2012
url	http://scholarbank.nus.edu.sg/handle/10635/33396
_version_	1821195773230972928

Integrated Metrology and Real-Time CD Control

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