The manufacture of micromould and microparts by vacuum casting

The manufacture of micromould and microparts by vacuum casting

10.1007/s00170-007-1151-4

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Bibliographic Details
Main Authors: Thian, S.C.H., Tang, Y., Tan, W.K., Fuh, J.Y.H., Wong, Y.S., Loh, H.T., Lu, L.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2013
Subjects:
Lithography
Microcavity
Micromoulds
Vacuum casting
White-light interferometry
Online Access:http://scholarbank.nus.edu.sg/handle/10635/42996
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/42996

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