Mechanism and Catalyst Stability of Metal-Assisted Chemical Etching of Silicon

Ph.D

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Bibliographic Details
Main Author:	PRAYUDI LIANTO
Other Authors:	SINGAPORE-MIT ALLIANCE
Format:	Theses and Dissertations
Language:	English
Published:	2013
Subjects:	metal-assisted, etching, silicon, holes, gold, catalyst
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/43420
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-43420
record_format	dspace
spelling	sg-nus-scholar.10635-434202015-01-17T00:35:16Z Mechanism and Catalyst Stability of Metal-Assisted Chemical Etching of Silicon PRAYUDI LIANTO SINGAPORE-MIT ALLIANCE CHOI WEE KIONG CARL THOMPSON metal-assisted, etching, silicon, holes, gold, catalyst Ph.D DOCTOR OF PHILOSOPHY 2013-07-31T18:00:56Z 2013-07-31T18:00:56Z 2013-01-23 Thesis PRAYUDI LIANTO (2013-01-23). Mechanism and Catalyst Stability of Metal-Assisted Chemical Etching of Silicon. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/43420 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	metal-assisted, etching, silicon, holes, gold, catalyst
spellingShingle	metal-assisted, etching, silicon, holes, gold, catalyst PRAYUDI LIANTO Mechanism and Catalyst Stability of Metal-Assisted Chemical Etching of Silicon
description	Ph.D
author2	SINGAPORE-MIT ALLIANCE
author_facet	SINGAPORE-MIT ALLIANCE PRAYUDI LIANTO
format	Theses and Dissertations
author	PRAYUDI LIANTO
author_sort	PRAYUDI LIANTO
title	Mechanism and Catalyst Stability of Metal-Assisted Chemical Etching of Silicon
title_short	Mechanism and Catalyst Stability of Metal-Assisted Chemical Etching of Silicon
title_full	Mechanism and Catalyst Stability of Metal-Assisted Chemical Etching of Silicon
title_fullStr	Mechanism and Catalyst Stability of Metal-Assisted Chemical Etching of Silicon
title_full_unstemmed	Mechanism and Catalyst Stability of Metal-Assisted Chemical Etching of Silicon
title_sort	mechanism and catalyst stability of metal-assisted chemical etching of silicon
publishDate	2013
url	http://scholarbank.nus.edu.sg/handle/10635/43420
_version_	1681082774047424512

Mechanism and Catalyst Stability of Metal-Assisted Chemical Etching of Silicon

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