Ion beam irradiation induced fabrication of silicon photonics - from 2D to 3D

Ph.D

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Main Author:	LIANG HAIDONG
Other Authors:	PHYSICS
Format:	Theses and Dissertations
Language:	English
Published:	2014
Subjects:	Ion beam, Si machining, SOI, 3D, vertical coupling, photonics
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/49104
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-49104
record_format	dspace
spelling	sg-nus-scholar.10635-491042015-01-06T17:32:18Z Ion beam irradiation induced fabrication of silicon photonics - from 2D to 3D LIANG HAIDONG PHYSICS MARK B H BREESE Ion beam, Si machining, SOI, 3D, vertical coupling, photonics Ph.D DOCTOR OF PHILOSOPHY 2014-01-31T18:00:13Z 2014-01-31T18:00:13Z 2013-08-01 Thesis LIANG HAIDONG (2013-08-01). Ion beam irradiation induced fabrication of silicon photonics - from 2D to 3D. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/49104 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	Ion beam, Si machining, SOI, 3D, vertical coupling, photonics
spellingShingle	Ion beam, Si machining, SOI, 3D, vertical coupling, photonics LIANG HAIDONG Ion beam irradiation induced fabrication of silicon photonics - from 2D to 3D
description	Ph.D
author2	PHYSICS
author_facet	PHYSICS LIANG HAIDONG
format	Theses and Dissertations
author	LIANG HAIDONG
author_sort	LIANG HAIDONG
title	Ion beam irradiation induced fabrication of silicon photonics - from 2D to 3D
title_short	Ion beam irradiation induced fabrication of silicon photonics - from 2D to 3D
title_full	Ion beam irradiation induced fabrication of silicon photonics - from 2D to 3D
title_fullStr	Ion beam irradiation induced fabrication of silicon photonics - from 2D to 3D
title_full_unstemmed	Ion beam irradiation induced fabrication of silicon photonics - from 2D to 3D
title_sort	ion beam irradiation induced fabrication of silicon photonics - from 2d to 3d
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/49104
_version_	1681083547692040192

Ion beam irradiation induced fabrication of silicon photonics - from 2D to 3D

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