Ion beam irradiation induced fabrication of silicon photonics - from 2D to 3D

Ion beam irradiation induced fabrication of silicon photonics - from 2D to 3D

Ph.D

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Bibliographic Details
Main Author: LIANG HAIDONG
Other Authors: PHYSICS
Format: Theses and Dissertations
Language:English
Published: 2014
Subjects:
Ion beam, Si machining, SOI, 3D, vertical coupling, photonics
Online Access:http://scholarbank.nus.edu.sg/handle/10635/49104
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Institution: National University of Singapore
Language: English

Internet

http://scholarbank.nus.edu.sg/handle/10635/49104

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