Geometrical error modeling and compensation using neural networks

• Main Authors: Tan, K.K., Huang, S.N., Lim, S.Y., Leow, Y.P., Liaw, H.C.
• Other Authors: MECHANICAL ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Compensation; Computer aided engineering; Control systems; Laser beams; Nonlinear systems
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/50933
• Institution: National University of Singapore

10.1109/TSMCC.2005.855527