Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates

10.1063/1.2186511

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Main Authors: Yang, S.-W., Dai, L., Chen, X.-T., Wu, P., Tan, V.B.C.
Other Authors: NUS NANOSCIENCE & NANOTECH INITIATIVE
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/51443
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-514432023-10-30T10:15:02Z Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates Yang, S.-W. Dai, L. Chen, X.-T. Wu, P. Tan, V.B.C. NUS NANOSCIENCE & NANOTECH INITIATIVE MECHANICAL ENGINEERING 10.1063/1.2186511 Applied Physics Letters 88 11 - APPLA 2014-04-24T09:34:37Z 2014-04-24T09:34:37Z 2006 Article Yang, S.-W., Dai, L., Chen, X.-T., Wu, P., Tan, V.B.C. (2006). Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates. Applied Physics Letters 88 (11) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2186511 00036951 http://scholarbank.nus.edu.sg/handle/10635/51443 000236062700067 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.2186511
author2 NUS NANOSCIENCE & NANOTECH INITIATIVE
author_facet NUS NANOSCIENCE & NANOTECH INITIATIVE
Yang, S.-W.
Dai, L.
Chen, X.-T.
Wu, P.
Tan, V.B.C.
format Article
author Yang, S.-W.
Dai, L.
Chen, X.-T.
Wu, P.
Tan, V.B.C.
spellingShingle Yang, S.-W.
Dai, L.
Chen, X.-T.
Wu, P.
Tan, V.B.C.
Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates
author_sort Yang, S.-W.
title Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates
title_short Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates
title_full Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates
title_fullStr Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates
title_full_unstemmed Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates
title_sort investigation of ta film growth mechanisms and atomic structures on polymer and sic amorphous substrates
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/51443
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