Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates
10.1063/1.2186511
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2014
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sg-nus-scholar.10635-514432023-10-30T10:15:02Z Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates Yang, S.-W. Dai, L. Chen, X.-T. Wu, P. Tan, V.B.C. NUS NANOSCIENCE & NANOTECH INITIATIVE MECHANICAL ENGINEERING 10.1063/1.2186511 Applied Physics Letters 88 11 - APPLA 2014-04-24T09:34:37Z 2014-04-24T09:34:37Z 2006 Article Yang, S.-W., Dai, L., Chen, X.-T., Wu, P., Tan, V.B.C. (2006). Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates. Applied Physics Letters 88 (11) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2186511 00036951 http://scholarbank.nus.edu.sg/handle/10635/51443 000236062700067 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1063/1.2186511 |
| author2 |
NUS NANOSCIENCE & NANOTECH INITIATIVE |
| author_facet |
NUS NANOSCIENCE & NANOTECH INITIATIVE Yang, S.-W. Dai, L. Chen, X.-T. Wu, P. Tan, V.B.C. |
| format |
Article |
| author |
Yang, S.-W. Dai, L. Chen, X.-T. Wu, P. Tan, V.B.C. |
| spellingShingle |
Yang, S.-W. Dai, L. Chen, X.-T. Wu, P. Tan, V.B.C. Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates |
| author_sort |
Yang, S.-W. |
| title |
Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates |
| title_short |
Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates |
| title_full |
Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates |
| title_fullStr |
Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates |
| title_full_unstemmed |
Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates |
| title_sort |
investigation of ta film growth mechanisms and atomic structures on polymer and sic amorphous substrates |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/51443 |
| _version_ |
1781411696168927232 |