Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates

Investigation of Ta film growth mechanisms and atomic structures on polymer and SiC amorphous substrates

10.1063/1.2186511

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Bibliographic Details
Main Authors: Yang, S.-W., Dai, L., Chen, X.-T., Wu, P., Tan, V.B.C.
Other Authors: NUS NANOSCIENCE & NANOTECH INITIATIVE
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/51443
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/51443

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