Scanning grating based in-plane movement sensing

10.1088/0960-1317/20/8/085007

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Bibliographic Details
Main Authors:	Yu, H., Zhou, G., Kumar Sinha, S., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/51520
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-51520
record_format	dspace
spelling	sg-nus-scholar.10635-515202023-10-25T22:33:19Z Scanning grating based in-plane movement sensing Yu, H. Zhou, G. Kumar Sinha, S. Chau, F.S. MECHANICAL ENGINEERING 10.1088/0960-1317/20/8/085007 Journal of Micromechanics and Microengineering 20 8 - JMMIE 2014-04-24T09:37:00Z 2014-04-24T09:37:00Z 2010-08 Article Yu, H., Zhou, G., Kumar Sinha, S., Chau, F.S. (2010-08). Scanning grating based in-plane movement sensing. Journal of Micromechanics and Microengineering 20 (8) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/20/8/085007 09601317 http://scholarbank.nus.edu.sg/handle/10635/51520 000280560600007 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1088/0960-1317/20/8/085007
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Yu, H. Zhou, G. Kumar Sinha, S. Chau, F.S.
format	Article
author	Yu, H. Zhou, G. Kumar Sinha, S. Chau, F.S.
spellingShingle	Yu, H. Zhou, G. Kumar Sinha, S. Chau, F.S. Scanning grating based in-plane movement sensing
author_sort	Yu, H.
title	Scanning grating based in-plane movement sensing
title_short	Scanning grating based in-plane movement sensing
title_full	Scanning grating based in-plane movement sensing
title_fullStr	Scanning grating based in-plane movement sensing
title_full_unstemmed	Scanning grating based in-plane movement sensing
title_sort	scanning grating based in-plane movement sensing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/51520
_version_	1781411708866134016

Scanning grating based in-plane movement sensing

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