Scanning grating based in-plane movement sensing
10.1088/0960-1317/20/8/085007
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Main Authors: | Yu, H., Zhou, G., Kumar Sinha, S., Chau, F.S. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/51520 |
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Institution: | National University of Singapore |
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