Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor

Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor

10.1117/1.JNP.6.063505

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Bibliographic Details
Main Authors: Chew, X., Zhou, G., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Directional waveguide couplers
Integrated optics
Microelectromechanical systems
Nanophotonics
Sensors
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85455
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/85455

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