Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor

10.1117/1.JNP.6.063505

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Main Authors: Chew, X., Zhou, G., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/85455
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-854552023-10-27T08:19:49Z Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor Chew, X. Zhou, G. Chau, F.S. MECHANICAL ENGINEERING Directional waveguide couplers Integrated optics Microelectromechanical systems Nanophotonics Sensors 10.1117/1.JNP.6.063505 Journal of Nanophotonics 6 1 - JNOAC 2014-10-07T09:08:13Z 2014-10-07T09:08:13Z 2012 Article Chew, X., Zhou, G., Chau, F.S. (2012). Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor. Journal of Nanophotonics 6 (1) : -. ScholarBank@NUS Repository. https://doi.org/10.1117/1.JNP.6.063505 19342608 http://scholarbank.nus.edu.sg/handle/10635/85455 000302117400001 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Directional waveguide couplers
Integrated optics
Microelectromechanical systems
Nanophotonics
Sensors
spellingShingle Directional waveguide couplers
Integrated optics
Microelectromechanical systems
Nanophotonics
Sensors
Chew, X.
Zhou, G.
Chau, F.S.
Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor
description 10.1117/1.JNP.6.063505
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Chew, X.
Zhou, G.
Chau, F.S.
format Article
author Chew, X.
Zhou, G.
Chau, F.S.
author_sort Chew, X.
title Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor
title_short Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor
title_full Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor
title_fullStr Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor
title_full_unstemmed Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor
title_sort nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/85455
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