Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor
10.1117/1.JNP.6.063505
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sg-nus-scholar.10635-854552023-10-27T08:19:49Z Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor Chew, X. Zhou, G. Chau, F.S. MECHANICAL ENGINEERING Directional waveguide couplers Integrated optics Microelectromechanical systems Nanophotonics Sensors 10.1117/1.JNP.6.063505 Journal of Nanophotonics 6 1 - JNOAC 2014-10-07T09:08:13Z 2014-10-07T09:08:13Z 2012 Article Chew, X., Zhou, G., Chau, F.S. (2012). Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor. Journal of Nanophotonics 6 (1) : -. ScholarBank@NUS Repository. https://doi.org/10.1117/1.JNP.6.063505 19342608 http://scholarbank.nus.edu.sg/handle/10635/85455 000302117400001 Scopus |
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Directional waveguide couplers Integrated optics Microelectromechanical systems Nanophotonics Sensors |
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Directional waveguide couplers Integrated optics Microelectromechanical systems Nanophotonics Sensors Chew, X. Zhou, G. Chau, F.S. Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor |
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10.1117/1.JNP.6.063505 |
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MECHANICAL ENGINEERING |
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MECHANICAL ENGINEERING Chew, X. Zhou, G. Chau, F.S. |
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Article |
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Chew, X. Zhou, G. Chau, F.S. |
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Chew, X. |
title |
Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor |
title_short |
Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor |
title_full |
Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor |
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Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor |
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Nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor |
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nanomechanically suspended low-loss silicon nanowire waveguide as in-plane displacement sensor |
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2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/85455 |
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