An electrostatic in-plane rotational MEMS micro-scanner

An electrostatic in-plane rotational MEMS micro-scanner

10.1109/OMEMS.2012.6318892

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Bibliographic Details
Main Authors: Mu, X., Zhou, G., Du, Y., Kumar, A.S., Chau, F.S., Yu, H., Tsai, J.M.-L.
Other Authors: MECHANICAL ENGINEERING
Published: 2014
Subjects:
MEMS
optical coherence tomography
pyramidal polygon reflector
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73164
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/73164

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