An electrostatic in-plane rotational MEMS micro-scanner

10.1109/OMEMS.2012.6318892

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Bibliographic Details
Main Authors:	Mu, X., Zhou, G., Du, Y., Kumar, A.S., Chau, F.S., Yu, H., Tsai, J.M.-L.
Other Authors:	MECHANICAL ENGINEERING
Published:	2014
Subjects:	MEMS optical coherence tomography pyramidal polygon reflector
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73164
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73164
record_format	dspace
spelling	sg-nus-scholar.10635-731642021-10-25T14:47:32Z An electrostatic in-plane rotational MEMS micro-scanner Mu, X. Zhou, G. Du, Y. Kumar, A.S. Chau, F.S. Yu, H. Tsai, J.M.-L. MECHANICAL ENGINEERING MEMS optical coherence tomography pyramidal polygon reflector 10.1109/OMEMS.2012.6318892 International Conference on Optical MEMS and Nanophotonics 240-241 2014-06-19T05:31:54Z 2014-06-19T05:31:54Z 2012 Mu, X., Zhou, G., Du, Y., Kumar, A.S., Chau, F.S., Yu, H., Tsai, J.M.-L. (2012). An electrostatic in-plane rotational MEMS micro-scanner. International Conference on Optical MEMS and Nanophotonics : 240-241. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2012.6318892 9781457715112 21605033 http://scholarbank.nus.edu.sg/handle/10635/73164 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	MEMS optical coherence tomography pyramidal polygon reflector
spellingShingle	MEMS optical coherence tomography pyramidal polygon reflector Mu, X. Zhou, G. Du, Y. Kumar, A.S. Chau, F.S. Yu, H. Tsai, J.M.-L. An electrostatic in-plane rotational MEMS micro-scanner
description	10.1109/OMEMS.2012.6318892
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Mu, X. Zhou, G. Du, Y. Kumar, A.S. Chau, F.S. Yu, H. Tsai, J.M.-L.
author	Mu, X. Zhou, G. Du, Y. Kumar, A.S. Chau, F.S. Yu, H. Tsai, J.M.-L.
author_sort	Mu, X.
title	An electrostatic in-plane rotational MEMS micro-scanner
title_short	An electrostatic in-plane rotational MEMS micro-scanner
title_full	An electrostatic in-plane rotational MEMS micro-scanner
title_fullStr	An electrostatic in-plane rotational MEMS micro-scanner
title_full_unstemmed	An electrostatic in-plane rotational MEMS micro-scanner
title_sort	electrostatic in-plane rotational mems micro-scanner
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73164
_version_	1715195319911710720

An electrostatic in-plane rotational MEMS micro-scanner

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