Modification of Si(100) surface by plasma-enhanced graft polymerization of allylpentafluorobenzene

Modification of Si(100) surface by plasma-enhanced graft polymerization of allylpentafluorobenzene

10.1163/156856101753207733

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Bibliographic Details
Main Authors: Zou, X.P., Kang, E.T., Neoh, K.G., Huang, W.
Other Authors: CHEMICAL & ENVIRONMENTAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Allypentafluorobenzene
Annealing
Plasma polymerization
Si(100)
XPS
Online Access:http://scholarbank.nus.edu.sg/handle/10635/52670
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/52670

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