Modification of Si(100) surface by plasma-enhanced graft polymerization of allylpentafluorobenzene

10.1163/156856101753207733

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Bibliographic Details
Main Authors:	Zou, X.P., Kang, E.T., Neoh, K.G., Huang, W.
Other Authors:	CHEMICAL & ENVIRONMENTAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Allypentafluorobenzene Annealing Plasma polymerization Si(100) XPS
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/52670
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Institution:	National University of Singapore

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