Plasma polymerization and deposition of glycidyl methacrylate on Si(100) surface for adhesion improvement with polyimide

10.1002/pat.146

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Bibliographic Details
Main Authors: Zou, X.P., Kang, E.T., Neoh, K.G., Zhang, Y., Tan, K.L., Cui, C.Q., Lim, T.B.
Other Authors: CHEMICAL & ENVIRONMENTAL ENGINEERING
Format: Article
Published: 2014
Subjects:
XPS
Online Access:http://scholarbank.nus.edu.sg/handle/10635/52673
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Institution: National University of Singapore