Plasma polymerization and deposition of glycidyl methacrylate on Si(100) surface for adhesion improvement with polyimide

Plasma polymerization and deposition of glycidyl methacrylate on Si(100) surface for adhesion improvement with polyimide

10.1002/pat.146

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Bibliographic Details
Main Authors: Zou, X.P., Kang, E.T., Neoh, K.G., Zhang, Y., Tan, K.L., Cui, C.Q., Lim, T.B.
Other Authors: CHEMICAL & ENVIRONMENTAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Adhesion
Epoxide group
Glycidyl methacrylate
Plasma polymerization
Polyimides
XPS
Online Access:http://scholarbank.nus.edu.sg/handle/10635/52673
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Institution: National University of Singapore
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