A CMOS readout circuit for SOI resonant accelerometer with 4-μg bias stability and 20-μg/√Hz resolution

A CMOS readout circuit for SOI resonant accelerometer with 4-μg bias stability and 20-μg/√Hz resolution

10.1109/JSSC.2008.923616

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Bibliographic Details
Main Authors: He, L., Xu, Y.P., Palaniapan, M.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Accelerometer
Bias stability
MEMS resonator
Oscillator
Phase noise
Online Access:http://scholarbank.nus.edu.sg/handle/10635/53943
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/53943

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