A CMOS readout circuit for SOI resonant accelerometer with 4-μg bias stability and 20-μg/√Hz resolution
10.1109/JSSC.2008.923616
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2014
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sg-nus-scholar.10635-539432023-10-26T08:14:15Z A CMOS readout circuit for SOI resonant accelerometer with 4-μg bias stability and 20-μg/√Hz resolution He, L. Xu, Y.P. Palaniapan, M. ELECTRICAL & COMPUTER ENGINEERING Accelerometer Bias stability MEMS resonator Oscillator Phase noise 10.1109/JSSC.2008.923616 IEEE Journal of Solid-State Circuits 43 6 1480-1490 IJSCB 2014-06-16T09:24:12Z 2014-06-16T09:24:12Z 2008-06 Article He, L., Xu, Y.P., Palaniapan, M. (2008-06). A CMOS readout circuit for SOI resonant accelerometer with 4-μg bias stability and 20-μg/√Hz resolution. IEEE Journal of Solid-State Circuits 43 (6) : 1480-1490. ScholarBank@NUS Repository. https://doi.org/10.1109/JSSC.2008.923616 00189200 http://scholarbank.nus.edu.sg/handle/10635/53943 000256310000015 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Accelerometer Bias stability MEMS resonator Oscillator Phase noise |
| spellingShingle |
Accelerometer Bias stability MEMS resonator Oscillator Phase noise He, L. Xu, Y.P. Palaniapan, M. A CMOS readout circuit for SOI resonant accelerometer with 4-μg bias stability and 20-μg/√Hz resolution |
| description |
10.1109/JSSC.2008.923616 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING He, L. Xu, Y.P. Palaniapan, M. |
| format |
Article |
| author |
He, L. Xu, Y.P. Palaniapan, M. |
| author_sort |
He, L. |
| title |
A CMOS readout circuit for SOI resonant accelerometer with 4-μg bias stability and 20-μg/√Hz resolution |
| title_short |
A CMOS readout circuit for SOI resonant accelerometer with 4-μg bias stability and 20-μg/√Hz resolution |
| title_full |
A CMOS readout circuit for SOI resonant accelerometer with 4-μg bias stability and 20-μg/√Hz resolution |
| title_fullStr |
A CMOS readout circuit for SOI resonant accelerometer with 4-μg bias stability and 20-μg/√Hz resolution |
| title_full_unstemmed |
A CMOS readout circuit for SOI resonant accelerometer with 4-μg bias stability and 20-μg/√Hz resolution |
| title_sort |
cmos readout circuit for soi resonant accelerometer with 4-μg bias stability and 20-μg/√hz resolution |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/53943 |
| _version_ |
1781411914714185728 |