A golden-block-based self-refining scheme for repetitive patterned wafer inspections

10.1007/s00138-002-0086-x

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Bibliographic Details
Main Authors:	Guan, S.-U., Xie, P., Li, H.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Golden block Golden template Image-to-image reference method PDI Wafer inspection
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/54224
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Institution:	National University of Singapore

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Summary:	10.1007/s00138-002-0086-x

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