A golden-block-based self-refining scheme for repetitive patterned wafer inspections
10.1007/s00138-002-0086-x
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sg-nus-scholar.10635-542242023-10-27T08:50:10Z A golden-block-based self-refining scheme for repetitive patterned wafer inspections Guan, S.-U. Xie, P. Li, H. ELECTRICAL & COMPUTER ENGINEERING Golden block Golden template Image-to-image reference method PDI Wafer inspection 10.1007/s00138-002-0086-x Machine Vision and Applications 13 5-6 314-321 MVAPE 2014-06-16T09:28:52Z 2014-06-16T09:28:52Z 2003-03 Article Guan, S.-U., Xie, P., Li, H. (2003-03). A golden-block-based self-refining scheme for repetitive patterned wafer inspections. Machine Vision and Applications 13 (5-6) : 314-321. ScholarBank@NUS Repository. https://doi.org/10.1007/s00138-002-0086-x 09328092 http://scholarbank.nus.edu.sg/handle/10635/54224 000182188600007 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Golden block Golden template Image-to-image reference method PDI Wafer inspection |
| spellingShingle |
Golden block Golden template Image-to-image reference method PDI Wafer inspection Guan, S.-U. Xie, P. Li, H. A golden-block-based self-refining scheme for repetitive patterned wafer inspections |
| description |
10.1007/s00138-002-0086-x |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Guan, S.-U. Xie, P. Li, H. |
| format |
Article |
| author |
Guan, S.-U. Xie, P. Li, H. |
| author_sort |
Guan, S.-U. |
| title |
A golden-block-based self-refining scheme for repetitive patterned wafer inspections |
| title_short |
A golden-block-based self-refining scheme for repetitive patterned wafer inspections |
| title_full |
A golden-block-based self-refining scheme for repetitive patterned wafer inspections |
| title_fullStr |
A golden-block-based self-refining scheme for repetitive patterned wafer inspections |
| title_full_unstemmed |
A golden-block-based self-refining scheme for repetitive patterned wafer inspections |
| title_sort |
golden-block-based self-refining scheme for repetitive patterned wafer inspections |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/54224 |
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1781411951010643968 |